Alcatel Micro Machining Systems

Alcatel Micro Machining Systems is a French manufacturer of Deep Reactive Ion Etching Systems. The company's headquarters are in Annecy, France. Alcatel Micro Machining Systems is also called AMMS.

History

Alcatel Vacuum Technology, based in Annecy (France) has been involved in plasma processing for more than 25 years.

Its first equipment based on an Alcatel patented Inductive Coupled Plasma (ICP) source, with independent source power and substrate bias control for deep etching of silicon was launched in 1993. The exponential growth potential of the MEMS (Micro Electro Mechanical Systems) industry gave birth to the Micro Machining Systems business group (MMS) in 1994.

Alcatel Micro Machining Systems (AMMS) is now a business unit within Alcatel Vacuum Technology headquartered in Annecy, France. AMMS is a world-class supplier of deep plasma etching systems to manufacturers of MEMS (Micro Electro Mechanical Systems) and devices related to microelectronics and micropackaging applications.

Competitors

After its creation in 1994, Alcatel Micro Machining Systems has increased it market shares from 14% (in 2000) to 34% (in 2005). By 2005, Alcatel Micro Machining Systems was ranked second ahead Trikon (Aviza), Unaxis and Oxford plasma technology.

Products

The company manufactures DRIE systems with a large portfolio of processes and applications including for example:

- Notching free<br />- Profile control<br />- Dry release<br />- Patented Sharp process:...
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