Etec Systems, Inc.

Etec Systems, Inc.

Etec Systems, Inc.

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Etec Systems was an American producer of scanning electron microscopes, electron beam lithography tools, and laser beam lithography tools from 1970 until 2005. It was located in Hayward, California and Hillsboro, Oregon.

Company history

Etec Corporation of Hayward, California, was formed in 1970 as a producer of scanning electron microscopes (SEMs), but later became a producer of electron beam lithography tools and SEM manufacture was discontinued.

Etec later merged with ATEQ of Beaverton, Oregon (Portland area) which manufactured laser beam lithography tools. The combined company was named "Etec Systems" and offered a portfolio of lithography relying on both electron and laser beams. These products targeted the photomasks and reticles used in integrated circuit manufacturing. In 1999 the Beaverton, Oregon portion of the company was moved to Hillsboro, Oregon.

Etec was purchased by Applied Materials in 2000, and organized within the Applied Materials corporation as an autonomous business group. In 2000, Etec employed 600 workers in Hayward.

Etec Systems was shut down by parent company Applied Materials in October 2005.


Scanning electron microscopes

Originally formed in 1970, Etec produced scanning electron microscopes of very high quality; many instruments are still working well 30 years later. Designed by Nelson Yew, the Autoscan has produced excellent images, out-performing modern instruments subject to digital noise and...
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